Scanning Electron Microscope with Chemical Microanalysis

Belarussian State Technological University
Research Laboratory
"Physicochemical Methods of Investigations"

Scanning Electron Microscope JSM-5610 LV
with Energy Dispersive X-ray Spectrometer JED-2201
JEOL (Japan)

The JSM-5610 LV, featuring a wide application microscope, incorporates the functions of a High Vacuum SEM and Low Vacuum SEM in a single instrument. When observing a nonconductive specimen with a HV SEM, the specimen is generally covered with a thin film of gold, carbon,etc. to make it conductive. When a specimen is not coated, it is observed at a low accelerating voltage of about 1 kV. The LV SEM allows nonconductive specimens to be observed in their original. Since it has no need to lower the accelerating voltage, it allows elemental analysis with an anergy dispersive X-ray spectrometer. It also give opportunity for the observation of specimens that contain water or are stained with oil.

Energy Dispersive X-ray Spectrometer JED-2201 detects all characteristic X-ray emitted from a specimen simultaneously. It allows even a specimen containing many types of elements to be analysis in a shot time. Full Quantitative/Qualitative analysis procedures can be combined with X-ray digital maps, area and line element distribution using the SEM-EDX integration features.

JSM-5610 LV

NaCl

Technical characteristics:

HV mode resolution	3.0 нм
LV mode resolution	4.5 нм
Magnification	х18 to х300 000

KH₂PO₄

Micromechanical gear

ZnO

Wood

Human Hair

Root of an Eyelash of the Man

JED-2201

Energy Dispersive X-ray Spectrometer JED-2201 give opportunity for full Quantitative/Qualitative analysis procedures can be combined with X-ray digital maps, area and line element distribution

Technical characteristics:

Detectable elements	В - U
Sensitivity	0.1-100 %

Chip

Distribution of Oxygen

Distribution of Aluminum

Distribution of Silicon

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